Synthesis of nitrogen-doped crystalline Ga2O3 thin films via trimethylgallium doped NH3/H2/N2/O2 premixed stagnation flames

Lun'ang Li, Shengfeng Luo, Mengzhao Chang, Guanjie Yin, Mingchen Sun, Jingrui Ma, Xiao Wei Sun, Igor Rahinov, Bo Zhou

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