Segmentation of the expected duration of maintenance activities in semiconductor fabs

Itai Regev; Diamanta Benson-Karhi

doi:10.1109/ASMC.2015.7164495

Segmentation of the expected duration of maintenance activities in semiconductor fabs

Itai Regev, Diamanta Benson-Karhi

Industrial Engineering and Management

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The duration and execution of preventive maintenance (PM) activities have a significant impact on maintaining effective control over factory equipment while ensuring that it is healthy and available for production. Although most PMs in the industry have similar structures, the task of generating an automated segmented view of the PM duration and flow to highlight inefficiencies and corresponding opportunities for improvement is complicated by a reliance on manual data entries made by human operators. In addition, most optimization and analysis models treat a PM as a single activity while ignoring its parts. In this paper, a model is proposed to generically segment a PM into its parts and define the expected PM duration. The segmentation, done automatically by sequencing the lots run on the tool, results in a clear overview of time losses in the PM and of opportunities for improvement.

Original language	English
Title of host publication	2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	280-285
Number of pages	6
ISBN (Electronic)	9781479999309
DOIs	https://doi.org/10.1109/ASMC.2015.7164495
State	Published - 22 Jul 2015
Event	26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015 - Saratoga Springs, United States Duration: 3 May 2015 → 6 May 2015

Publication series

Name	2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015

Conference

Conference	26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015
Country/Territory	United States
City	Saratoga Springs
Period	3/05/15 → 6/05/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

Availability
DT
PM
Productivity
Segmentation

Access to Document

10.1109/ASMC.2015.7164495

Cite this

Regev, I., & Benson-Karhi, D. (2015). Segmentation of the expected duration of maintenance activities in semiconductor fabs. In 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015 (pp. 280-285). Article 7164495 (2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ASMC.2015.7164495

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Regev, I & Benson-Karhi, D 2015, Segmentation of the expected duration of maintenance activities in semiconductor fabs. in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015., 7164495, 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015, Institute of Electrical and Electronics Engineers Inc., pp. 280-285, 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015, Saratoga Springs, United States, 3/05/15. https://doi.org/10.1109/ASMC.2015.7164495

Segmentation of the expected duration of maintenance activities in semiconductor fabs. / Regev, Itai; Benson-Karhi, Diamanta.
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 280-285 7164495 (2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Regev I, Benson-Karhi D. Segmentation of the expected duration of maintenance activities in semiconductor fabs. In 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 280-285. 7164495. (2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015). doi: 10.1109/ASMC.2015.7164495

Segmentation of the expected duration of maintenance activities in semiconductor fabs

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

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